- Title
- Experimental Evaluation of Non-uniform Thin Film Stress
- Creators - without role
- 偉中 王P. Y. ChenY. S. Lin
- Publication Details
- 2021 SEM Annual Conference and Exposition on Experimental and Applied Mechanics
- Identifiers
- 9957766675506774
- Academic Unit
- Center for India Studies, Office of Academic Affairs, National Tsing Hua University
- Language
- English
- Resource Type
- Conference paper
Conference paper
Experimental Evaluation of Non-uniform Thin Film Stress
2021 SEM Annual Conference and Exposition on Experimental and Applied Mechanics
2021
Related links
Metrics
1 Record Views