- Title
- Experimental Investigation of Utilizing Molecule Based Pressure and Temperature Sensors in MEMS research
- Creators - without role
- C.-Y. Huang - 國立清華大學工學院動力機械工程學系C.-A. LiC.-M. Lai
- Publication Details
- The International Symposium on Microchemistry and Microsystems (ISMM 2011) The International Symposium on Microchemistry and Microsystems (ISMM 2011)
- Identifiers
- 9957766494706774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Experimental Investigation of Utilizing Molecule Based Pressure and Temperature Sensors in MEMS research
The International Symposium on Microchemistry and Microsystems (ISMM 2011) The International Symposium on Microchemistry and Microsystems (ISMM 2011)
2011
Metrics
1 Record Views