- Title
- Exploring the Microstructure, Corrosion and Thermal Stability of DLC Films Deposited by High Power Impulse Magnetron Sputtering
- Creators - without role
- Jin-Bao WuJia-Jen ChangChao-Ying ChenDing-Shiang WangHao-Wen ChengMing-Sheng LeuShou-Yi Chang - 國立清華大學工學院材料科學工程學系
- Publication Details
- MRS Proceedings, Symposium S “Diamond Electronics and Biotechnology – Fundamentals to Applications VII” of MRS Fall Meeting MRS Proceedings, Symposium S “Diamond Electronics and Biotechnology – Fundamentals to Applications VII” of MRS Fall Meeting
- Identifiers
- 9957767377906774
- Academic Unit
- Department of Materials Science and Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Exploring the Microstructure, Corrosion and Thermal Stability of DLC Films Deposited by High Power Impulse Magnetron Sputtering
MRS Proceedings, Symposium S “Diamond Electronics and Biotechnology – Fundamentals to Applications VII” of MRS Fall Meeting MRS Proceedings, Symposium S “Diamond Electronics and Biotechnology – Fundamentals to Applications VII” of MRS Fall Meeting
2013
Metrics
1 Record Views