Extracting Young's Modulus and Residual Stress Through Measuring Pull-in and Release Voltages of Microstructures

Conference paper

Y.-C. Chen and R. Chen

The 23rd International Microprocesses and Nanotechnology Conference The 23rd International Microprocesses and Nanotechnology Conference

2010

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Title: Extracting Young's Modulus and Residual Stress Through Measuring Pull-in and Release Voltages of Microstructures
Creators - without role: Y.-C. Chen
R. Chen - 國立清華大學工學院動力機械工程學系
Publication Details: The 23rd International Microprocesses and Nanotechnology Conference The 23rd International Microprocesses and Nanotechnology Conference
Identifiers: 9957771068206774
Academic Unit: Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper