Abstract
We developed a fabrication method of a curved valve chamber for a nanochannel open/close valve on a glass substrate and succeeded in reducing leakage of the valve. Previously, we developed a nanochannel open/close valve utilizing glass deformation, but since the curved deflection of glass could not completely block the rectangular channels, leakage by solute diffusion was inevitable. Herein, we conceived pressing the valve repeatedly and deform the valve chamber to the shape of the glass deflection curve. After 20,000 times of pressing, a curved valve chamber was successfully fabricated and the leakage was reduced to 1.3 % with this valve.