FINE-LINE HIGH-SPEED EXCIMER LASER LITHOGRAPHY.

Conference paper

K. Jain, C.G. Willson and B.J. Lin

Digest of Technical Papers - Symposium on VLSI Technology, pp.92-93

1982

Abstract

Electrical and Electronic Engineering

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Title: FINE-LINE HIGH-SPEED EXCIMER LASER LITHOGRAPHY.
Translated title: FINE-LINE HIGH-SPEED EXCIMER LASER LITHOGRAPHY.
Creators - without role: K. Jain
C.G. Willson
B.J. Lin
Publication Details: Digest of Technical Papers - Symposium on VLSI Technology, pp.92-93
Identifiers: 9957774237906774
Academic Unit: Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: English
Resource Type: Conference paper