Abstract
This study presents the monolithic integration of pressure sensor, gas sensor and thermometer to realize an environmental sensing hub (Fig. 1), based on the TSMC 0.18 m 1P6M CMOS platform. Merits of the proposed design are: (1) SoC environment sensing hub consisting capacitive pressure sensor, diode thermometer, and metal-oxide semiconductor (MOS) gas sensor with vertically-integrated heater, and (2) CVD parylene and drop casting ZnO-SnO2 for post-CMOS processes to enable the integration of pressure and gas sensors. Measurements demonstrate performances of proposed environmental sensing hub: pressure sensor with sensitivity of 0.23 fF/kPa, gas sensor with response of 0.06%/% for O2 detection, and thermometer with sensitivity of 0.82 mV/°C.