- Title
- Fabrication and integration of SOC environment sensing hub with gas/pressure/temperature sensors
- Creators - without role
- 維倫 方
- Identifiers
- 9957777105406774
- Academic Unit
- Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
- Language
- English
- Resource Type
- Conference paper
- Publication Details
- Proceeding of the 35th IEEE International Conference on MEMS
Conference paper
Fabrication and integration of SOC environment sensing hub with gas/pressure/temperature sensors
Proceeding of the 35th IEEE International Conference on MEMS
01/2022
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