- Title
- Fabrication and measurement on hydrogenated amorphous silicon rib waveguides deposited by plasma-enhanced chemical vapor deposition
- Creators - without role
- Kai-Ning KuWei-Chao ChiuKun-Yu LeeMing-Chang M. Lee - 國立清華大學電機資訊學院電機工程學系Jian-Hua ChenJia-Min Shieh
- Publication Details
- The 16th symposium on Nanodevice Technology
- Identifiers
- 9957768804306774
- Academic Unit
- Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Fabrication and measurement on hydrogenated amorphous silicon rib waveguides deposited by plasma-enhanced chemical vapor deposition
The 16th symposium on Nanodevice Technology
2009
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