- Title
- Fabrication of Complex Micro-Nano Hybrid Silicon Structures using Metal-Assisted Chemical Etching
- Creators - without role
- T.-W. WuY.-C. Su - 國立清華大學原子科學院工程與系統科學系
- Identifiers
- 9957776057306774
- Academic Unit
- Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Fabrication of Complex Micro-Nano Hybrid Silicon Structures using Metal-Assisted Chemical Etching
2016
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