- Title
- Fabrication of Low stress a-SixC1-x:H Films for the Application of MEMS
- Creators - without role
- T. Y. LinC. K. ChungK. Y. WengJ. G. Duh - 國立清華大學工學院材料科學工程學系
- Publication Details
- Nano-Structured and Amorphous Materials Symposium Nano-Structured and Amorphous Materials Symposium
- Identifiers
- 9957772224206774
- Academic Unit
- National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Fabrication of Low stress a-SixC1-x:H Films for the Application of MEMS
Nano-Structured and Amorphous Materials Symposium Nano-Structured and Amorphous Materials Symposium
2000
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