Abstract
In this paper we present a 1D non-resonant micromirror device with PZT thin film actuators and integrated buried piezoresistors for feedback control. The non-linearity of the PZT thin film actuator can be compensated by the buried piezoresistors with good linearity. The sensitivity could be improved to be 3.1 mV/° when the piezoresistors were placed along the actuator beams, which was more than 370 times higher than that from the sensors placed on the torsion bar (8.2 V/°). The mechanical response of the device was evaluated, and the transfer function from PZT drive signal to angle output was obtained. The non-resonant slow scan operation at 50 Hz showed a maximum residual error within 2.5% with the settling time of less than 3 ms.