Abstract
The fabrication and experimental investigation of a fiberoptic microphone is described. The sensing element is a silicon diaphragm with gold thin film coating that is positioned inside a silicone rubber mold at the end of a single mode optical fiber. Thus, a Fabry-Perot interferometer is formed between the inner fiber and the diaphragm. An acoustic pressure change is detected by using the developed microphone. The polymeric cavity and silicon diaphragm-based system exhibits excellent physicochemical properties with a small, simple, low cost, and lightweight design. The system is also electromagnetic interference / radio frequency interference immunity due to the use of fiberoptics. © 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).