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Film Thickness and Curing Effects on Moisture Diffusion in Polyimide Coated on Silicon
Conference paper

Film Thickness and Curing Effects on Moisture Diffusion in Polyimide Coated on Silicon

J.-H. Jou and C.-P. Weng
The Proc. of 1992 Annu. Conf. of Chinese Soc. for Mat. Sci. The Proc. of 1992 Annu. Conf. of Chinese Soc. for Mat. Sci.
1992

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