Abstract
The finite-difference time-domain (FDTD) method is extended to analyze layered surface acoustic wave (SAW) filters. In this method, the partial derivatives of quasi-static Maxwell's equations and the equation of motion are discretized to centered finite-differences. In addition, the perfectly matched layer (PML) boundary condition is applied to reduce the spurious reflections. The proposed method is used to analyze a ZnO/Diamond/Si layered SAW filter with electrode massloading. The simulated results are in a good agreement with the existing experimental data, indicating that the FDTD method is an appropriate approach for modeling SAW devices. © 2005 IEEE.