First Demonstration of Ultrafast Laser Annealed Monolithic 3D Gate-All-Around CMOS Logic and FeFET Memory with Near-Memory-Computing Macro

Conference paper

International Electron Devices Meeting

12/2020

Abstract

Near-Memory-Computing;3D Gate-All-Around CMOS

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Title: First Demonstration of Ultrafast Laser Annealed Monolithic 3D Gate-All-Around CMOS Logic and FeFET Memory with Near-Memory-Computing Macro
Creators - without role: 孟凡張
Identifiers: 9957773341406774
Academic Unit: Institute of Electronics Engineering, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: English
Resource Type: Conference paper
Publication Details: International Electron Devices Meeting