Abstract
This paper demonstrates a novel flexible carbon nanotubes (CNTs) electrode array for neural recording. In this device, the CNTs electrode arrays are partially embedded into the flexible Parylene-C film using a batch microfabrication process. Through this fabrication process, the CNTs can be exposed to increase the total sensing area of an electrode. Thus, the flexible CNTs electrode of low impedance is realized. In application, the flexible CNTs electrode has been employed to record the neural signal of a crayfish nerve cord for in vitro recording. The measurements demonstrate the superior performance of the presented flexible CNTs electrode with low impedance (11.07 kΩ at 1 kHz) and high peak to peak amplitude action potential (about 410 μV). The simultaneous recording of the flexible CNTs electrode array is also demonstrated. ©2009 IEEE.