Abstract
Flowing thermal lens micro flow velocimeter (FTL-MFV) is an optical detector for measurement of flow rate in microchannel without disturbing the microfluid. By using optical fibers and micro rod lenses, we have fabricated a series of small FTL-MFVs. In this paper, we report on a FTL-MFV with an on-chip microlens, that we newly developed to simplify optical alignment process needed for FTL-MFV measurements. Performance of FTL-MFV was also improved by using an on-chip microlens. © 2006 Society for Chemistry and Micro-Nano Systems.