Abstract
Atomic force microscopy (AFM) is widely used in many fields, because of its outstanding force measurement ability in nano scale. Some coating layers are used to enhance the signal intensity, but these coating layers affect the spring constant of AFM cantilever and the accuracy of force measurement. In this paper, the spring constants of rectangular cantilever with different coating thickness were quantitatively measured and discussed. The finite element method was used to analyze the nonlinear force-displacement behavior from which the cantilever's normal and torsional spring constants could be determined. The experimental data and the numerical results were also compared with the results from other methods. By considering the influence of coating layers and real cantilever geometries, the more accurate force measurements by AFM cantilever can be obtained.