- Title
- Formation of amorphous Al-bearing native-oxide by wet oxidation with high interface quality using a thin GaP barrier layer
- Creators - without role
- L. J. ChouK. C. HsiehA. MoyD. E. WohlertG. PickrellK. Y. Cheng
- Publication Details
- 1998 Electronic Materials Conference
- Identifiers
- 9957776854906774
- Academic Unit
- National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Formation of amorphous Al-bearing native-oxide by wet oxidation with high interface quality using a thin GaP barrier layer
1998 Electronic Materials Conference
1998
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