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Formation of micro-lens by reflow of dual photoresist
Conference paper

Formation of micro-lens by reflow of dual photoresist

H. Hocheng, C.T. Pan and C.C. Cheng
2002 International Microprocesses and Nanotechnology Conference, MNC 2002, pp.198-199
2002

Abstract

The microlens has found wide applications of emitters and detectors in fiber optical communication. Several feasible fabrication methods of a microlens have been reported, namely volume change of a substrate, volume growth in PMMA, photoresist reflow method and dipping method. The common concerns are the long processing time and reliability in volume manufacturing. The current study presents an innovative process utilizing a composite layer to achieve fast and neat fabrication of micro-balls in array.

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