- Title
- Formation of nickel silicide using low-temperature microwave annealing
- Creators - without role
- M.-K. HuangW.-F. Wu - 國立清華大學原子科學院工程與系統科學系C.-H. ShihS.-L. Chen
- Identifiers
- 9957773256106774
- Academic Unit
- Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Formation of nickel silicide using low-temperature microwave annealing
2012
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