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Frequency and Coupling Factor Scaling of Shear Horizontal SAW Resonators in LNOI Platform
Conference paper

Frequency and Coupling Factor Scaling of Shear Horizontal SAW Resonators in LNOI Platform

Kuan-Ju Tseng and Ming-Huang Li
IFCS-ISAF 2020 - Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, Proceedings, 9234916
07/2020

Abstract

electromechanical coupling factor lithium niobate SAW shear horizontal Signal Processing Electronic Optical and Magnetic Materials Instrumentation Atomic and Molecular Physics and Optics
In this work, the scalability between frequency and electromechanical coupling factor (k_{t}^{2}) is demonstrated by shear horizontal surface acoustic wave (SH-SAW) resonators based on lithium niobate on insulator (LNOI). The dispersive characteristic is observed from the simulation, and is later substantiated by the fabricated devices with various wavelengths. A high electromechanical coupling factor (k_{t}^{2}) of 25.1% was recorded throughout the measurement at a normalized LN thickness of 0.25. Linear response was also disclosed under different input power, verifying the adoption of LNOI topology. Thus, the measured results unveil the potential usage of SH-SAW resonators for wideband applications in communication systems.

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