GIDL and F-N Tunneling Current Correction in Modified Charge Pumping Techniques for Profiling Traps in High-κ Gated MOSFETs Induced by CHC and PBT stress

Conference paper

Chun-Chang Lu, Kuei-Shu Chang-Liao, Che-Hao Tsao, Tien-Ko Wang, Fu-Chung Hou and Yao-Tung Hsu

2011

Abstract

GIDL;F-N Tunneling;Current Correction;Modified Charge Pumping;High-κ Gated MOSFETs;CHC;PBT

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Title: GIDL and F-N Tunneling Current Correction in Modified Charge Pumping Techniques for Profiling Traps in High-κ Gated MOSFETs Induced by CHC and PBT stress
Creators - without role: Chun-Chang Lu
Kuei-Shu Chang-Liao - 國立清華大學原子科學院工程與系統科學系
Che-Hao Tsao
Tien-Ko Wang
Fu-Chung Hou
Yao-Tung Hsu
Identifiers: 9957766403406774
Academic Unit: Institute of Nuclear Engineering and Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper