Geometric Effect of Polygates on Nanoscale nMOSFETs Using Silicon-Carbon Alloy in Strain Engineering

Conference paper

C. C. Lee, C. H. Liu, H. H. Teng and T. L. Tzeng

TACT 2013 International Thin Films Conference TACT 2013 International Thin Films Conference

2013

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Title: Geometric Effect of Polygates on Nanoscale nMOSFETs Using Silicon-Carbon Alloy in Strain Engineering
Creators - without role: C. C. Lee - 國立清華大學工學院動力機械工程學系
C. H. Liu
H. H. Teng
T. L. Tzeng
Identifiers: 9957777213306774
Academic Unit: Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper
Publication Details: TACT 2013 International Thin Films Conference TACT 2013 International Thin Films Conference