Abstract
This study integrates the low-resistance silicon-via as an electrode with glass microprobe to achieve a multistyle electrode arrangement. Thus, the top-side, back-side and double-side electrodes can be easily implemented for different applications. The double-side electrode could detect neural signal from both sides of probe (V T /V B ∼1), while the signal detected by single-side electrode has better spatial resolution (V T /V B ≫1). To demonstrate the feasibility of this study, the single-side and double-side probes were fabricated and tested. Experiment results quantitatively show the double-side electrode has a nearly equal recording field at both sides of probe. The APs (action potentials) recorded from rat brain also successfully demonstrate the recording ability of double-side electrode.