Heat Treatment of Nanocrystalline TiN Films Deposited by Unbalanced Magnetron Sputtering

Conference paper

3rd Asian Conference on Chemical Vapor Deposition 3rd Asian Conference on Chemical Vapor Deposition

2004

Abstract

Heat Treatment;Nanocrystalline TiN Films;Unbalanced Magnetron Sputtering

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Title: Heat Treatment of Nanocrystalline TiN Films Deposited by Unbalanced Magnetron Sputtering
Creators - without role: Jia-Hong Huang - 國立清華大學原子科學院工程與系統科學系
Kae-Jy Yu
P. Sit
Ge-Ping Yu
Publication Details: 3rd Asian Conference on Chemical Vapor Deposition 3rd Asian Conference on Chemical Vapor Deposition
Identifiers: 9957766932306774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper