Heating-Assisted for Ultrasonic Nanoimprint Lithography

Conference paper

C.-H. Lin, C.-Y. Wang and R. Chen

Nanotechnology, 2009. IEEE-NANO 2009. 9th IEEE Conference Nanotechnology, 2009. IEEE-NANO 2009. 9th IEEE Conference, pp.126-129

2009

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Title: Heating-Assisted for Ultrasonic Nanoimprint Lithography
Creators - without role: C.-H. Lin
C.-Y. Wang
R. Chen - 國立清華大學工學院動力機械工程學系
Publication Details: Nanotechnology, 2009. IEEE-NANO 2009. 9th IEEE Conference Nanotechnology, 2009. IEEE-NANO 2009. 9th IEEE Conference, pp.126-129
Identifiers: 9957773728606774
Academic Unit: Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper