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Heterostructurally integrated III-V semiconductors through wafer-bonding: Interface adhesion and reliability
Conference paper

Heterostructurally integrated III-V semiconductors through wafer-bonding: Interface adhesion and reliability

F. Shi, C.F. Xu, K.L. Chang, J. Epple, K.Y. Cheng and K.C. Hsieh
Materials Research Society 2003 Spring Meeting
2003

Abstract

Heterostructurally;semiconductors;wafer-bonding

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