- Title
- (HfNbSiTaZr)CxNy多元碳氮化物薄膜之結構與性質研究
- Translated title
- Microstructure and Properties of Multi-element (HfNbSiTaZr)CxNy coatings
- Creators - without role
- 昱成 郭君翰 簡樹均 林 - 國立清華大學工學院材料科學工程學系
- Identifiers
- 9957775920706774
- Academic Unit
- National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
(HfNbSiTaZr)CxNy多元碳氮化物薄膜之結構與性質研究
2016
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