- Title
- High Mobility at Ultralow EOT in Ge pMOSFET by Hf-rich Buffer Layer and Microwave Annealing
- Creators - without role
- Chen-Chien LiKuei-Shu Chang-Liao - 國立清華大學原子科學院工程與系統科學系Tzu-Min LeeMong-Chi LiWei-Fong ChiTing-Chun ChenTzu-Hsiang SuYu-Wei ChangChia-Chi TsaiYan-Lin LiLi-Jung LiuChung-Hao FuChun-Chang LuYao-Jen Lee
- Publication Details
- 46 th IEEE Semiconductor Interface Specialists Conference 46 th IEEE Semiconductor Interface Specialists Conference
- Identifiers
- 9957771773606774
- Academic Unit
- Institute of Nuclear Engineering and Science, College of Nuclear Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
High Mobility at Ultralow EOT in Ge pMOSFET by Hf-rich Buffer Layer and Microwave Annealing
46 th IEEE Semiconductor Interface Specialists Conference 46 th IEEE Semiconductor Interface Specialists Conference
2015
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