- Title
- High Thermal Stability of AlCrTaTiZr Nitride Film as Diffusion Barrier for Copper Metallization
- Creators - without role
- Shou-Yi Chang - 國立清華大學工學院材料科學工程學系Ming-Ku Chen
- Publication Details
- Proceedings of ThinFilms 2008 Proceedings of ThinFilms 2008
- Identifiers
- 9957771889706774
- Academic Unit
- Department of Materials Science and Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
High Thermal Stability of AlCrTaTiZr Nitride Film as Diffusion Barrier for Copper Metallization
Proceedings of ThinFilms 2008 Proceedings of ThinFilms 2008
2008
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