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High resolution TEM and nano-beam structural/compositional analysis of ultra-thin films in GMR sensor
Conference paper

High resolution TEM and nano-beam structural/compositional analysis of ultra-thin films in GMR sensor

Rong-Tan Huang, Fu-Rong Chen, Ji-Jung Kai and I-Fei Tsu
Digests of the Intermag Conference
2000

Abstract

The structure and composition of the ultra-thin film in a giant magnetoresistance (GMR) device were studied using a field emission gun TEM (FEG TEM) equipped with energy dispersive x-ray spectroscopy (EDS) and energy filter systems. Focus was on the sandwich structure of the CoFe/Cu/CoFe multilayers. By way of analysis, the change of the thickness of Cu film or another was determined. Based on this observation, the degradation of magnetoresistance in the sensor was followed.

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