High responsivity GaInAs PIN photodiodes by using erbium gettering

Conference paper

W. J. Ho, S. H. Denq and M. C. Wu

Proc. Electron Devices and Materials Symposium

1995

Abstract

GaInAs;photodiodes;erbium

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Title: High responsivity GaInAs PIN photodiodes by using erbium gettering
Creators - without role: W. J. Ho
S. H. Denq
M. C. Wu - 國立清華大學電機資訊學院電機工程學系
Publication Details: Proc. Electron Devices and Materials Symposium
Identifiers: 9957768120106774
Academic Unit: Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper