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Highly Reliable and High-Yield 1.2V HfZrOx FRAM and its Physical Origin via Micrometer-Scale Nanocrystalline Domain Analysis
Conference paper

Highly Reliable and High-Yield 1.2V HfZrOx FRAM and its Physical Origin via Micrometer-Scale Nanocrystalline Domain Analysis

世杰 張
Technical Digest - International Electron Devices Meeting, IEDM
2024

Abstract

Ferroelectric RAM;Hafnium alloys;Hafnium compounds;Strain measurement;Velocity measurement

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