Abstract
This study designs and implements piezoelectric MEMS scanning mirror aimed at reducing nonlinearity for light steering applications. The novelty of this study is to replace the clamped-clamped actuators with the hybrid-actuators with transmission-spring. Thus, the nonlinearity and stress on piezoelectric film, caused by doubly-clamped actuators, are reduced. Moreover, the scanning angle is enlarged due to the hybrid-actuators. Both the reference and proposed design were fabricated on SOI wafer with KNN piezoelectric film. Measurement results revealed that the proposed design reduces nonlinearity and increases the scanning angle by 44.6%.