- Title
- Impact of Strain Engineering on InGaAs NMOSFET with a InGaAs Alloy Stressor
- Creators - without role
- P. H. SunC. C. Lee - 國立清華大學工學院動力機械工程學系S. T. Chang
- Publication Details
- International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2010) International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2010)
- Identifiers
- 9957767012906774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Impact of Strain Engineering on InGaAs NMOSFET with a InGaAs Alloy Stressor
International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2010) International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2010)
2010
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