- Title
- Impact of Strain Engineering on Nanoscale Strained Si NMOSFETs with a Silicon-Carbon Alloy Stressor
- Creators - without role
- W. C. WangC. C. Lee - 國立清華大學工學院動力機械工程學系J. HuangS. T. Chang
- Publication Details
- International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2009) International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2009)
- Identifiers
- 9957773176206774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Impact of Strain Engineering on Nanoscale Strained Si NMOSFETs with a Silicon-Carbon Alloy Stressor
International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2009) International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2009)
2009
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