Abstract
This paper demonstrated on the design, fabrication, and testing of a novel zero-insertion-force (ZIF) MEMS-connector. The three-mask and silicon-on-insulator (SOI) wafer were designed for the easy fabrication of the terminals and latches simultaneously. The terminal was a multi-morph cantilever to form a hook-like shape providing the reliable contact at the contact interface. The terminals and the latches were actuated by electrostatic force to avoid wearing and kinking during the mating process. The implementation details were provided and the property measurement results were conducted to confirm the feasibility and superiority of the proposed ZIF MEMS-connector. ©2009 IEEE.