Improved Leakage Current for TiO2-Based MIM Capacitors by Embedding Ge Nanocrystals

Conference paper

Yu-Hsun Chen, Meng-Ting Yu, Chia-Chun Lin and Yung-Hsien Wu

International Conference on Solid State Devices and Materials (SSDM) International Conference on Solid State Devices and Materials (SSDM)

2014

Abstract

Improved Leakage;TiO2-Based MIM Capacitors;Embedding Ge Nanocrystals

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Title: Improved Leakage Current for TiO2-Based MIM Capacitors by Embedding Ge Nanocrystals
Creators - without role: Yu-Hsun Chen - National Tsing Hua University
Meng-Ting Yu
Chia-Chun Lin
Yung-Hsien Wu - 國立清華大學原子科學院工程與系統科學系
Publication Details: International Conference on Solid State Devices and Materials (SSDM) International Conference on Solid State Devices and Materials (SSDM)
Identifiers: 9957775367106774
Academic Unit: Tsing Hua College, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper