- Title
- Innovation Study on Low Surface Roughness of Diamond Thin Film
- Creators - without role
- 宏營 蔡
- Publication Details
- Proceeding of 7th Nano Engineering and Micro System Technology Workshop
- Identifiers
- 9957770817606774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- English
- Resource Type
- Conference paper
Conference paper
Innovation Study on Low Surface Roughness of Diamond Thin Film
Proceeding of 7th Nano Engineering and Micro System Technology Workshop
2003
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