- Title
- Innovative fabrication method of 4” thin LiNbO3 layer on Si substrate for high frequency modulators
- Creators - without role
- 宏營 蔡
- Publication Details
- Thin Films 2004 & Nano Tech 2004
- Identifiers
- 9957776639506774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- English
- Resource Type
- Conference paper
Conference paper
Innovative fabrication method of 4” thin LiNbO3 layer on Si substrate for high frequency modulators
Thin Films 2004 & Nano Tech 2004
2004
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