Abstract
We developed a system for controlling multiple nanochannel open/close valves, and developed a method of fluid control for nanofluidics. We previously developed a nanochannel open/close valve utilizing glass deformation and verified fluid operations using the valve. However, because there was no system for controlling multiple valves, stable fluid control has not been realized. With our system, switching of two nanochannel flows within 0.25 s utilizing two valves was demonstrated. The repeatability of the flow switching was as high as ±1.6 %. This new nanofluidic controlling method using valves will realize sophisticated fluid operations and novel nanofluidic analytical devices.