- Title
- Interaction Influence of S/D GeSi Lattice Mismatch and Stress Gradient of CESL on Nano-Scaled Strained NMOSFETs
- Creators - without role
- C. C. Lee - 國立清華大學工學院動力機械工程學系P. C. HuangY. T. KuoD. Y. LiC. H. Liu
- Identifiers
- 9957772141306774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
- Publication Details
- 7thInternational Symposium on Control of Semiconductor Interfaces (ISCSI-VII) 7thInternational Symposium on Control of Semiconductor Interfaces (ISCSI-VII)
Conference paper
Interaction Influence of S/D GeSi Lattice Mismatch and Stress Gradient of CESL on Nano-Scaled Strained NMOSFETs
7thInternational Symposium on Control of Semiconductor Interfaces (ISCSI-VII) 7thInternational Symposium on Control of Semiconductor Interfaces (ISCSI-VII)
2016
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