- Title
- Investigation of Interconnect Design on Interfacial Cracking Energy of Al/TiN Barriers under a Flexural Load
- Creators - without role
- C. C. Lee - 國立清華大學工學院動力機械工程學系Y. F. SuC. S. WuK. N. Chiang
- Identifiers
- 9957772989306774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
- Publication Details
- 6th International Conference on Technological Advances of Thin Films & Surface Coatings (ThinFilms2012), 6th International Conference on Technological Advances of Thin Films & Surface Coatings (ThinFilms2012),
Conference paper
Investigation of Interconnect Design on Interfacial Cracking Energy of Al/TiN Barriers under a Flexural Load
6th International Conference on Technological Advances of Thin Films & Surface Coatings (ThinFilms2012), 6th International Conference on Technological Advances of Thin Films & Surface Coatings (ThinFilms2012),
2012
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