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Investigation of digital AlxGa1-xAs alloy (x > 0.8) for lateral oxidation and regrowth applications
Conference paper

Investigation of digital AlxGa1-xAs alloy (x > 0.8) for lateral oxidation and regrowth applications

G.W. Pickrell, K.L. Chang, J.H. Epple, K.C. Hsieh and K. Y. Cheng
2002 Electronic Materials Conference
2002

Abstract

AlxGa1-xAs;lateral oxidation

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