- Title
- Investigation of plasma treatment and impurity doping effects for copper germanide formation on SiO2 substrate
- Creators - without role
- C. A. JongW. F. Wu - 國立清華大學原子科學院工程與系統科學系R. M. WangJ. L. Tsai
- Identifiers
- 9957771894106774
- Academic Unit
- Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Investigation of plasma treatment and impurity doping effects for copper germanide formation on SiO2 substrate
2011
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