Ion Beam Assisted Deposition of TiN Thin Films on Silicon Substrates - Fabrication and Characterization

Conference paper

J.-H. Huang, C.-H. Lin and Haydn Chen

100th annual meeting of The American Ceramic Society 100th annual meeting of The American Ceramic Society

1998

Abstract

Ion Beam Assisted Deposition;TiN Thin Films;Silicon Substrates;Fabrication;Characterization

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Title: Ion Beam Assisted Deposition of TiN Thin Films on Silicon Substrates - Fabrication and Characterization
Creators - without role: J.-H. Huang - 國立清華大學原子科學院工程與系統科學系
C.-H. Lin
Haydn Chen
Identifiers: 9957772770606774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper
Publication Details: 100th annual meeting of The American Ceramic Society 100th annual meeting of The American Ceramic Society