- Title
- Kinematic Analysis of the Planetary Train in Chemical Mechanical Planarization
- Creators - without role
- 宏營 蔡
- Publication Details
- Proceedings of euspen 1st Conference for Precision Engineering and Nanotechnology
- Identifiers
- 9957775192306774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- English
- Resource Type
- Conference paper
Conference paper
Kinematic Analysis of the Planetary Train in Chemical Mechanical Planarization
Proceedings of euspen 1st Conference for Precision Engineering and Nanotechnology
1999
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