Laplace pressure valve utilizing nano-in-nano structure toward attoliter scale liquid handling

Shogo Kubota; Kazuma Mawatari; Yan Xu; Takehiko Kitamori

Conference paper

Laplace pressure valve utilizing nano-in-nano structure toward attoliter scale liquid handling

Shogo Kubota, Kazuma Mawatari, Yan Xu and Takehiko Kitamori

15th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2011, MicroTAS 2011, Vol.2, pp.1068-1070

2011

Appears in keyword about Chemistry

Abstract

Attoliter scale liquid handling

Contact angle

Laplace pressure

Nanofluidics

Control and Systems Engineering

This paper reports a method of handling attoliter (aL=10 L) scale liquid in pressure-driven nanofluidic control systems. In order to achieve this, nonmechanical valve was developed that utilized nano-in-nano structure fabricated by two-step etching process using e-beam lithography and dry etching. Copyright © (2011) by the Chemical and Biological Microsystems Society.

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Title: Laplace pressure valve utilizing nano-in-nano structure toward attoliter scale liquid handling
Translated title: Laplace pressure valve utilizing nano-in-nano structure toward attoliter scale liquid handling
Creators - without role: Shogo Kubota - Department of Applied Chemistry , School of Engineering , University of Tokyo
Kazuma Mawatari - Department of Applied Chemistry , School of Engineering , University of Tokyo
Yan Xu - Osaka Prefecture University
Takehiko Kitamori - Department of Applied Chemistry , School of Engineering , University of Tokyo
Identifiers: 9781618395955; 9957771112606774
Academic Unit: Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper
Publication Details: 15th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2011, MicroTAS 2011, Vol.2, pp.1068-1070

Laplace pressure valve utilizing nano-in-nano structure toward attoliter scale liquid handling

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